The Pfeiffer CMR 364 capacitance diaphragm gauge, with CF 1-1/3 (DN 16 CF-R) flange, has a full scale measuring range of 1 hPa (1 mBar/750 mTorr) and a minimum measure of 10^-4 mbar (7.5 x10^-2 mTorr). This gauge has a response time of 30ms with an accuracy of 0.2% of the measured value. A ceramic aluminum oxide capacitive sensor element is used to measure the absolute pressure of gasses, independent of gas type or composition. Lookup tables and gas conversion calculations are not needed.

Pfeiffer CMR 361, 362, 363, 364 and 365 ceramic capacitance diaphragm gauges are compatible with TPG 361, 362 and 366 Pfeiffer gauge controllers and require a sensor cable, available on this website in lengths from 3 to 10 meters. Controller and cable sold separately.

Operating instructions and technical data are below and available in the downloads.