The pump is a Roots type vacuum pump which rotates a pair of non-contact multi-stage rotors synchronized by timing gears. The timing gears and bearings are enclosed in a compartment which is independent of the casing. For lubrication Perfluoro-Polyether (PFPE) oil and grease are used. The pumps of this series are factory filled with lubrication oil. Use only the recommended lubrication. For complete use, instructions and specs see .pdf manual below.

Benefits and Features of the Ebara EV-S20P series dry roots pumps.

• Small, Compact Size
• Non-Contact Design
• Constant Ultimate Pressure
• No Production of Tip Seal Dust
• High Atmospheric Pumping Speeds
• CE and NRTL rated
• Low Vibration
• Low Noise
• Maintenance Free

Applications

• Load Lock
• Analytical Instruments (LCMS Liquid Chromatography–Mass Spectrometry, GCMS Gas Chromatography Mass Spectrometry)
• Metrology - SEM (Scanning Electron Microscopes), TEM (Transmission Electron Microscopy)
• PVD (Physical Vapor Deposition) Sputter Systems
• Drying Vacuum Ovens
• Oxygen Plasma Systems
• Wet Pump Replacement
• Scroll Pump Replacement
• Clean Application
• Glove Boxes
• Lyophilization (Freeze Drying)
• Sterilizers (Vaporized Hydrogen Peroxide Sterilizer medical devices Vacuum Steam Sterilization for Hospital Applications)
• Leak Detectors
• Beam Line & Synchrotrons
• High Energy Physics (Research & Development Laboratories – R&D)
• Space Simulation Chambers
• Turbo Pump Backing
• Flexible LED Video Display Manufacturing
• Absolutely Clean & Dry Vacuum for Medical Devices & PCB Board Manufacturing
• Medium Duty, compete with PFPE Rotary Vane Pumps, Pumping Oxygen Applications. Plasma O2 CF4