The Agilent Varian VHS-10 has been designed to fill a special need in applications where high pumping speeds are required and space limitations demand a compact pump. The VHS-10 pump is a rugged, general-purpose unit with an operating range of 1.7 x 10-3 to <5 x 10-9 Torr at 4400W. The Agilent Varian VHS-10 is ideal for applications requiring fast cycling because of its high pumping speed (maximum rated at 5300 l/s with standard cold cap) air combined with high forepressure tolerance (0.65 Torr with no-load and 0.55 Torr when at full gas load). Backstreaming rate of the unit is 5x10-4 mg/cm²/ min, without the use of any cooled cold cap.

This Agilent Varian VHS-10 Diffusion Pump Includes:

• 10 Inch ASA Inlet Flange (16 Inch OD Flange, 12 Smooth Bolt Holes, 1" Diameter Holes)
• 2 inch ASA 6 inch OD Outlet Foreline Flange
• Standard Cold Cap
• Recommended Roughing Backing Pump: 30 CFM
• 5300 l/s Maximum Pumping Speed Air
• 380 VAC 3 ph (5100W) with (2) 2550 Watt Heaters
• Water Connections 1/8 in. FPT Tee
• Designed To Be Used With Santovac 5 or IVP 704 Diffusion Pump Oil, 1000cc (1.056 Qt.) full charge

Diffusion pumps use a high-speed jet of vapor to direct gas molecules in the pump throat down into the bottom of the pump and out the outlet. The oil diffusion pump is operated with an oil that has low vapor pressure. Its purpose is to achieve higher vacuum (lower pressure) than possible by use of positive displacement pumps alone. The Agilent Varian VHS-10 can pump down to pressures of <5x10-9 Torr. Diffusion pumps cannot discharge directly into the atmosphere, so a mechanical forepump, roughing pump is typically used to maintain an outlet pressure around 1 mTorr.

These Agilent Varian Diffusion Pumps are very reliable, simple in design and operate with no noise or vibration. Diffusion pumps are still the most economical means for creating high-vacuum pressures. Diffusion pumps also tolerate operating conditions such as excess particles and reactive gases that would destroy other types of high-vacuum pumps. They can be ordered with a 3-phase 208, 240, 380, 480 VAC heater harness and with standard or extended cold cap. We stock and sell Santovac 5 diffusion pump fluids for this pump. Please see below in our “Related” section for additional accessories that may benefit your vacuum applications and maintenance needs. We offer a large variety of vacuum greases, oils, vacuum fittings, hoses, vacuum gauges, sensors/transducers, parts and accessories sold separately on this website.

These Agilent Varian VHS-10 diffusion pumps have ASA 10 inch inlet flange, operate on 3-phase 380 VAC, standard cold cap and has Agilent Varian part number F0426346. The Agilent Varian VHS-10 diffusion pump user's instruction manuals can be downloaded in PDF format below. These are typical stock items that often ship same day as order is placed.

ITEM DESCRIPTION PART NO. 1   Standard Cold Cap Assembly F0429301 2   Extended Cold Cap Assembly L8917301 3   Sight Glass Repair Kit consisting of: Sight Glass L8816001 Gasket, Teflon L9694001 O-ring, Viton, Parker No. 2-113 ComI O-ring, Viton, Parker No. 2-226 ComI L8908301 4   Jet Assembly F0428401 5   Jet Coupling L6367301 6   Splash Baffle F0431301 7   Foreline Baffle Assembly F0435301 8   Thermal Switch Includes: 8a - Switch (set at 300°F – 147°C) 642906025 8b - Lug 648056680 8c - Wire 656179100 8d - Box Insulator 89867001 L8912301 9   Heater wire, 10 AWG, 42 inches (3 per pump required) X3901-68003   Heater Wiring Kit, Includes: 15 ft. wire Nickel lug 648056680 Terminal Strip Molex 39100-1512 648091065 L8913301 10   Heaters (two heaters required per pump) 208 V / 2200 watt Heater Element 647310140 240 V / 2200 watt Heater Element, 1Ph 647310150 380 V / 2200 watt Heater Element 647310160 480 V / 2200 watt Heater Element, wired open Delta, unbalanced load 647310170 208 V / 2550 watt Heater Element 647310145 240 V / 2550 watt Heater Element, 1Ph 647310155 380 V / 2550 watt Heater Element, wired open Delta, unbalanced load 647310165 480 V / 2550 watt Heater Element, wired open Delta, unbalanced load 647310175 11   Heater Crush Plate (replace when either heater is replaced) K7667001 12   Heater Clamping Plate A36 Steel K4928001 12   Heater Clamping Plate Retrofit, Slotted R2667301 13   Heater Insulating Blanket L8914001 14   Heater Cover L8903301 15   O-Ring Kit includes: 1 inlet flange O-ring, Butyl No. 2-385 F0430001 1 foreline flange O-ring, Butyl No. 2-338 660893338 10 Viton fill and drain O-rings (old style), Viton No. 2-112 10 Viton fill and drain O-rings (new style, Viton No. 2-113 1 Sight glass O-ring, Parker No. 2-226 1 PTFE gasket K0377169 16   Viton Centering ring for ISO inlet flange, 320K 17   Centering ring for ISO foreline flange ISO-63K IC063SV   Included with the pump 1 inlet flange O-ring, Butyl No. 2-385 F0430001 1 Butyl foreline flange O-ring, Butyl No. 2-338 660893338 3/8 Hose 1/8 Pipe Barbed Connectors 264301102 Installation and Operation Manual-download from www.agilent.com/chem/vacuum 699901023   DC-702 diffusion pump fluid, 500 cc (2 required) 695472005   DC-704 diffusion pump fluid, 500 cc (2 required) 695474005   DC-705 diffusion pump fluid, 500 cc (2 required) 695475005